Electron–N₂ interactions in RF E × B fields

This study reports on rate coefficient data for excitation of electronic states and ionization of N2 molecules by electrons exposed to mutually perpendicular radio frequency electric and magnetic fields. These quantities were obtained by means of a Monte Carlo simulation, which provides mean electron energies and corresponding energy distributions within one oscillation of the external fields. The time-resolved mean electron energies and rate coefficients as well as their period averaged values are presented. Calculations were performed for different field frequencies, including one of the standard frequencies in the industrial use, 13.56 MHz, and for effective reduced electric field values of 300 and 500 Td, while the effective reduced magnetic field was varied up to 2000 Hx. The fundamental aspect of the obtained results is discussed, which is followed by a collection of tabular data for their eventual use in future models of inductively coupled N2 plasma sources.