Cross-scale and cross-precision structures/systems fabricated by high-efficiency and low-cost hybrid 3D printing technology

Three-dimensional (3D) printing is widely used in many fields such as micro-optics, microbiology, and microfluidics. However, using existing technologies is a challenge to efficiently fabricate high-quality 3D structures with cross-scale and cross-precision. In this paper, we propose a low-cost hybrid processing technology that combines two-photon polymerization (TPP) and DMD micro stereolithography (DMDMSL) (TPP-DMDMSL). This low-cost hybrid processing technology is a two-part alignment achieved by combining marker positioning and image processing, and then by coordinating the transformation of processing data. Using the same mark as a bridge, the two independent technologies are linked to realize hybrid processing. The high synergetic combination of the two technologies is realized by using the mask as the benchmark and combining it with the flexible real-time transformation of processing data. The horizontal and vertical alignment accuracy is 2 µm and 3 µm, respectively. TPP-DMDMSL unites the high precision of TPP with the high efficiency of DMDMSL. Taking the aspheric lens as an example (radius = 163 µm, height = 33 µm), TPP-DMDMSL reduces the time from 4 h to 1 h. The maximum surface error is 0.22 µm, which does not affect the image quality according to the Rayleigh criterion. TPP-DMDMSL manufactures different types of structures. These results prove that TPP-DMDMSL can print multiple types of 3D structures across scales and precision, which is challenging or time-consuming with existing technologies. TPP-DMDMSL will likely be extended to more micro and nano fields based on the original general technology. TPP-DMDMSL provides strong basic techniques and ideas for integrated hybrid processing systems in the future.