AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application
Micromachines（2022）
Key words
MEMS mirror,piezoelectric,AlScN,mechanical coupling,Lissajous scanning,LiDAR
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined