MORPHIC: MEMS enhanced silicon photonics for programmable photonics

INTEGRATED PHOTONICS PLATFORMS II（2022）

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摘要

We present our work in the European project MORPHIC to extend an established silicon photonics platform with low-power and non-volatile micro-electromechanical (MEMS) actuators to demonstrate large-scale programmable photonic integrated circuits (PICs).

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关键词

silicon photonics, MEMS, programmable photonics

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