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Modelling analysis for design of microshutters with new electrode configuration

Ming Ke,Alexander S. Kutyrev,Carl A. Kotecki,Kyowon Kim,Matthew A. Greenhouse,Meng-Ping Chang,Rainer Fettig,Regis P. Brekosky,Yongjie Hu

Sensors and Actuators A: Physical（2022）

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Abstract
The Next Generation Microshutter Array (NGMSA) is an all-electrostatic actuated, programmable light transmission device used for multi-object spectroscopy. The latest NGMSA is designed to operate by applying a voltage difference between the shutter blade electrode and a single back wall electrode. We investigate the effects of different wall electrode configurations and present a bi-electrode design that allows reliable shutter actuation at a voltage difference of 70V.
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Electrostatic,Actuator,Microshutter array,Multi-object spectroscopy
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