Modelling Analysis for Design of Microshutters with New Electrode Configuration
Sensors and Actuators A Physical（2022）
关键词
Electrostatic,Actuator,Microshutter array,Multi-object spectroscopy
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要
Sensors and Actuators A Physical（2022）