Electrothermal 1D Varifocal Metalens

Conference on Lasers and Electro-Optics(2022)

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摘要
We report a MEMS-based spatial light modulator which consists of an electrothermally actuated varifocal metasurface. The focal length spans over 40 µm for less than 10 V and presents a high compactness and simplicity of fabrication.
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关键词
electrothermal 1d varifocal metalens,MEMS-based spatial light modulator,electrothermally actuated varifocal metasurface,focal length,size 40.0 mum,voltage 10.0 V
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