Enhancement of inductance and quality factor of solenoid inductor by Integrating Printing magnetic film On glass wafer

In this paper, we proposed a planer spiral inductor with printed magnetic material on glass wafer. Without the property of high relative permeability (μr in this paper is 6), the printed magnetic material took the advantage of convenient process and being available to fulfill the whole space between conductor lines, which can donate more inductance lift. In addition, glass wafer with high resistivity will decrease the effects of eddy currents on substrates, which does help to get higher quality value.