Manufacturing of Si-based hybrid metamaterials for increasing the refractive index in interference coatings

Philipp Henning,Marco Jupé,Stefan Bruns,Thomas Melzig,Morten Steinecke,Andreas Wienke,Michael Vergöhl

Optical Interference Coatings Conference (OIC) 2022（2022）

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Abstract

Si/SiO2 metamaterials are produced by magnetron sputtering, and allow for a high refractive index of ~3 in the visible, as shown by model calculations. In these hybrid materials the absorption edge of Si is blue-shifted due to quantization effects.

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