High throughput low cost closed field magnetron sputter deposition of durable reflectors based on dielectric overcoated metal for application in non-dispersive infrared gas sensors
Optical Interference Coatings Conference (OIC) 2022(2022)
Abstract
Optical & mechanical properties of closed-field magnetron pulsed DC sputter deposited Al, Au & Ag with Al2O3 protective layer are presented. Results show optical & durability performance suitable for use within NDIR optical gas sensors.
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Key words
durable reflectors,non-dispersive
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