Characterization of light scattering point defects in IBS coating for very low loss mirrors
Optical Interference Coatings Conference (OIC) 2022(2022)
摘要
Point defects in coating induce detrimental scattering loss. For this purpose, the defects density and size distribution were analyzed for silica and tantala layers by studying the influence of the thickness and the annealing parameters.
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关键词
mirrors,point defects,ibs
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