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Inline Magnetron Sputtering for Optical Filters on Flat and Curved Glass Substrates

Daniel Gloess, Ullrich Hartung, Andy Drescher, Joerg Neidhardt,Peter Frach,Hagen Bartzsch

Optical Interference Coatings Conference (OIC) 2022（2022）

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Abstract
Inline magnetron sputtering allows deposition of precise optical filters on large substrates. Examples of filters deposited on flat and curved glass substrates will be presented.
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Key words
optical filters,curved glass substrates,sputtering
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