Effects of Annealing on Residual Stress in Titania Germania Mixtures Deposited by Ion Beam Sputtering

Emmett Randel,Aaron Davenport, Ruth Osovsky,Emile ´ Lalande,Martin Chicoine,François Schiettekatte,Ashot Markosyan,Riccardo Bassiri,Martin M. Fejer,Carmen S. Menoni

Optical Interference Coatings Conference (OIC) 2022（2022）

引用 0|浏览1

暂无评分

摘要

We report on the effects of annealing on the residual film stress in titania germania mixtures grown by ion beam sputter deposition. Understanding stress during processing is critical in designing robust multilayer coatings.

查看译文

关键词

titania germania mixtures,ion beam,annealing,residual stress

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要