Disturbance Observer-Based Sliding Mode Control for MEMS with Prescribed Performance

In this study, we study the performance guaranteed tracking problem for the uncertain MEMS gyroscope dynamics. A fixed-time nonlinear function and the transformed error are introduced to establish the preset time control property for the closed-loop system. Then, a funnel sliding mode controller is presented to stabilize the system. To compensate for the uncertainty and external disturbance, a novel lumped disturbance observer is proposed. Different from most existing compensation control results for the MEMS gyroscope with antidisturbance that can only achieve uniformly ultimately bounded, the proposed control scheme is able to ensure that the system errors converge to the preassigned compact sets within a given time rather than infinite time and the system outputs track the desired command asymptotically. Simulation verification also confirms the effectiveness of the proposed approach.