Performance evaluation and optimization of vacuum pressure swing adsorption cycle for CF4 recovery using activated carbon

•The cycle performance of vacuum pressure swing adsorption cycle for CF4 is studied.•The effects of efficiency of working unit on cycle performance are compared.•The maximum values of Pur, Re, and Eff can reach 0.72, 0.931 and 0.075 respectively.•The work of the vacuum pump is an important determinant of cycle energy consumption.•The results of two kind of decision methods are the same under different weights.