Batch‐Sprayed and Stamp‐Transferred Electrodes: A New Paradigm for Scalable Fabrication of Multilayer Dielectric Elastomer Actuators

Multilayer dielectric elastomer actuators have a wide range of potential applications, but their development and commercial implementation have been hindered by existing manufacturing processes. Existing processes are low-throughput, limited in area, and/or can only process a narrow range of elastomers. This work presents a novel fabrication paradigm that overcomes these challenges: instead of sequentially patterning electrodes directly onto successive elastomer layers, electrode stamps are patterned onto a carrier film in an independent batch-spray process and the electrodes are then stamp-transferred onto each elastomer layer. By modularizing the production and assembly of electrodes, a laboratory-scale implementation of the process achieves a throughput of 15 layers h(-1), a maximum electrode size of 300x300 mm, and tuning-free compatibility with a wide range of elastomers. The batch-spraying paradigm also provides the unique capability to evaluate and modify electrodes before they are assembled into a multilayer; a method of mechanically treating the electrodes is employed to increase the breakdown strength of Elastosil P7670 devices from 15.7 to 33.5 V mu m(-1). The electrodes are conductive up to a strain of more than 200% and add negligible stiffness to the multilayer structure. The capabilities of this process to produce useful devices are demonstrated with a large-area loudspeaker and an actuator with 60 active layers.