High-Q refractive index sensors based on all-dielectric metasurfaces
RSC ADVANCES(2022)
摘要
Possessing fantastic abilities to freely manipulate electromagnetic waves on an ultrathin platform, metasurfaces have aroused intense interest in the academic circle. In this work, we present a high-sensitivity refractive index sensor excited by the guided mode of a two-dimensional periodic TiO2 dielectric grating structure. Numerical simulation results show that the optimized nanosensor can excite guided-mode resonance with an ultra-narrow linewidth of 0.19 nm. When the thickness of the biological layer is 20 nm, the sensitivity, Q factor, and FOM values of the nanosensor can reach 82.29 nm RIU-1, 3207.9, and 433.1, respectively. In addition, the device shows insensitivity to polarization and good tolerance to the angle of incident light. This demonstrates that the utilization of low-loss all-dielectric metasurfaces is an effective way to achieve ultra-sensitive biosensor detection.
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