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Efficient Heterogeneous Integration of InP/Si and GaSb/Si Templates with Ultra-Smooth Surfaces.

Jin Tingting,Lin Jiajie,You Tiangui,Zhang Xiaolei,Liang Hao,Zhu Yifan,Sun Jialiang,Shi Hangning,Chi Chaodan,Zhou Min,Kudrawiec Robert,Wang Shumin,Ou Xin

Science China Information Sciences（2022）

Cited 4|Views42
Key words
heterogeneous integration,InP/Si,GaSb/Si,MBE,ion-slicing technique,selective chemical etching
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