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Measurement of Wavefront Aberration of Lens Based on Phase Measuring Deflectometry

LASER & OPTOELECTRONICS PROGRESS(2022)

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Abstract
In this paper, a model that regards lens with aberration as a combination of ideal thin lens and prisms array is proposed, which is dedicated to verify that the transmissive phase measuring deflectometry is feasible to measure the wavefront aberration of the lens. The simulation results of ZEMAX and Matlab verify that the wavefront aberration of lens obtained in raytracing and in reverse raytracing are approximately equal. Based on this conclusion, an experimental setup is built and the wavefront aberration of a single lens with an aperture of 75 mm is measured. The experimental results show that the method only needs a CCD camera and a LCD display to complete the measurement, which has the feature of simple equipment and easy operation without complicated calibration, providing a method for online measurement of wavefront aberration of the lens.
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Key words
measurement and metrology, optical inspection, phase measuring deflectometry, wavefront aberration, prism model
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