Dynamics model of scanning probe on GMC

Chunxia Lu,Jianhua Wang, Alimujiang. Aili,Shaokang Li,Zhimin Hou

Measurement（2022）

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摘要

•Two-degree-of-freedom dynamic model describe dynamic performance of scanning probe.•Dynamic calculation formula of involute error based on dynamic measurement process.•Consistency between simulated and real output of probe prove the dynamic model.•Error evaluation based on dynamic model improve the measurement accuracy.

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关键词

Scanning probe,Dynamic model,Two-degree-of-freedom,Error compensation

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