Macrosteps formation on 4H-SiC surfaces via Si melting within a sandwich configuration

Yann Jousseaume,Francois Cauwet,Gabriel Ferro

Journal of Crystal Growth（2022）

引用 2|浏览6

暂无评分

摘要

•A sandwich setup was used to induce step-bunching on 4H-SiC surfaces.•Contact with liquid Si led to terraces a few micrometers wide on a controlled area.•Mass transport within the liquid is discussed to explain the observed results.

查看译文

关键词

B.2 Semiconducting silicon compounds,A1. Crystal morphology,A1. Surface structure,A1. Solubility,A1. Convection,A3. Liquid phase epitaxy

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要