Route to flexible metamaterial terahertz biosensor based on multi-resonance dips

A flexible terahertz (THz) metamaterial biosensor is theoretically and experimentally investigated. The metamaterial unit cell of the periodic structure array was simply composed of three non-overlapping cut wires with different length parameters on a flexible thin-film (parylene-C) to improve sensitivity. The biosensor sample was fabricated using a lithography process and characterized by a THz time-domain spectroscopy (TDS) system. The metamaterial exhibited multi-resonance dips in transmission spectrum at 0.6-2.0 THz, which can self-correct errors in biosensing. Numerical results show that the Q-factor, figure of merit (FOM) and sensitivity can change in dynamic ranges with the geometric parameters (space and width) of three-cut-wire metamaterial. When space distance was 40 mu m and other parameters were default, the sensitivity, FOM and Q-factor reached 710 GHz/RIU (Refractive Index Unit), 9, and 20, respectively. Therefore, through proper design and preparation, the metamaterial can be applied to biochemical detection. (C) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement