A flexible tactile sensor that uses polyimide/graphene oxide nanofiber as dielectric membrane for vertical and lateral force detection

NANOTECHNOLOGY(2022)

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摘要
Flexible force sensors are of great interest in the fields of healthcare, physiological signals, and aircraft smart skin applications because of their compatibility with curved surfaces. However, the simultaneous detection of multidirectional forces remains an engineering challenge, despite the great progress made in recent years. Herein, we present the development of a flexible capacitive force sensor capable of efficiently distinguishing normal and sliding shear forces. A two-layer electrospun polyimide/graphene oxide (PI/GO) nanofiber membrane is used as the dielectric layer, which is sandwiched between one top electrode and four symmetrically distributed bottom electrodes. This composite membrane has an improved dielectric constant, a reduced friction coefficient, and good compressibility, leading to superior performance that includes high sensitivity over a wide operational range with measured results of 3 MPa-1 for 0-242 kPa (0-2.2 N) and 0.92 MPa-1 for 242-550 kPa (2.2-5 N) in the normal direction; and better than 1 N-1 for 0-3 N in the x- and y-axis directions. The system also has a low detection limit of 10 Pa, fast response and recovery times of 39 ms and 13 ms, respectively, a good cyclic stability of 10,000 cycles at a pressure of 176 kPa, and promising potential for use in high-temperature environments (200 degrees C). Moreover, a prototype 4 x 4 sensor array has been fabricated and successfully used in a robotic system to grasp objects and operate a wireless toy car. As such, the proposed system could offer superior capabilities in simultaneous multidirectional force sensing for applications such as intelligent robots, human-machine interaction, and smart skin.
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关键词
three-dimensional perception, flexible, capacitive force sensor, composite nanofiber membrane
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