Optimization of Anchor Placement in TPoS MEMS Resonators: Modeling and Experimental Validation
Journal of Microelectromechanical Systems（2022）
Key words
Resonators,Strain,Resonant frequency,Substrates,Finite element analysis,Electrodes,Load modeling,Anchor loss,modeling,microelectromechanical systems (MEMS),thin film piezoelectric on substrate (TPoS) resonator,AlN piezoelectric-on-silicon,Q-factor,insertion loss,lateral mode
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