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Inhibition of Interlayer Diffusion and Reduction of Impurities in Thin Metal Films by Ion Irradiation

I. O. Kruhlov,A. K. Orlov,O. Dubikovskyi,Y. Iguchi,Z. Erdelyi,S. Sidorenko,T. Ishikawa,S. Prikhodko,S. M. Voloshko

MATERIALS TODAY COMMUNICATIONS（2023）

Cited 2|Views26
Key words
Thin films,Diffusion,Low-energy ion irradiation,Impurities,Annealing
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