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Tunable Low-Loss Silicon Nitride Integrated Circuits

A.S. Baburin,E.S. Lotkov, E.V. Sergeev, M. Andronic,D. A. Baklykov, V. E. Stukalova,K. A. Buzaverov, S.S Avdeev,I.A. Ryzhikov,I.V. Dyakonov, N. Skryabin,M. Yu. Saygin,S.P. Kulik,I.A. Rodionov

2022 International Conference Laser Optics (ICLO)（2022）

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关键词
photonic integrated circuit,silicon nitride,single photon,low-loss waveguide
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