Plasma prepared nanostructured complex oxide materials for advanced UV-visible detectors

L.A. Mochalov,A.A. Logunov,M.A. Kudryashov,I.O. Prokhorov,M.A. Vshivtsev,E.U. Rafailov,Yu. P. Kudryashova,Yu. M. Spivak,V.A. Moshnikov,A.V. Knyazev,E.N. Bulanov, A.V. Barykin

2022 International Conference Laser Optics (ICLO)（2022）

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摘要

Oxide semiconductors for ultraviolet (UV) - visible detection have attracted attention in recent years. The extreme sensitivity and resolution of these materials, as well as their radiation resistance, are grounds for their potential widespread use in various applications.

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关键词

PECVD,Ga2O3,ZnO,Oxide detectors

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