High-Yield Heterogeneous Integration of Silicon and Lithium Niobate Thin Films

Stijn Cuyvers,Tom Vanackere,Tom Vandekerckhove,Stijn Poelman,Camiel Op de Beeck,Jasper De Witte,Artur Hermans,Kasper Van Gasse,Nathalie Picqué,Dries Van Thourhout,Gunther Roelkens,Stéphane Clemmen,Bart Kuyken

Conference on Lasers and Electro-Optics（2022）

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摘要

Microtransfer printing of silicon and lithium niobate thin films on generic integrated photonic platforms is demonstrated. An unprecedented integration yield is achieved using crack barriers as a way to mitigate stress-induced shears in the material.

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关键词

lithium niobate thin films,microtransfer printing,generic integrated photonic platforms,unprecedented integration yield

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