MOS Capacitor Driven Silicon Microring Resonator with Large Wavelength Tunability

Wei-Che Hsu, Benjamin Kupp,Cade Trotter, Nabila Nujhat,John F. Conley,Alan X. Wang

Conference on Lasers and Electro-Optics（2022）

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摘要

We demonstrated a silicon microring resonator driven by high mobility titanium-doped indium oxide MOS capacitor. It achieved an unprecedented wavelength tunability of 480 pm/V with field-effect mobility of 70 cm2V-1s-1 in the gate.

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关键词

(250.4110) Modulators,(250.7360) Waveguide modulators

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