Wafer-Scale Functional Metasurfaces on Free-Standing Membranes

Ming Lun Tseng,Aleksandrs Leitis,Aurelian John-Herpin,Yuri S Kivshar,Hatice Altug

Conference on Lasers and Electro-Optics（2022）

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摘要

We demonstrate free-standing metasurfaces made by a new wafer-scale and CMOS compatible nanofabrication method and produce nanostructures over large-area transparent oxide membranes. Applications include narrow-band spectral filtering, efficient light focusing, polarization control and optofluidic biosensors.

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关键词

(220.4241) Nanostructure fabrication,(160.3918) Metamaterials,(280.1415) Biological sensing and sensors

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