Monolithic Integration of Quantum Emitters with Silicon Nitride Photonic Platform

Alexander Senichev,Samuel Peana,Zachariah O. Martin,Omer Yesilyurt,Demid Sychev,Alexei S. Lagutchev,Alexandra Boltasseva,Vladimir M. Shalaev

Conference on Lasers and Electro-Optics（2022）

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摘要

Silicon nitride has great potential for integrated quantum photonics. We demonstrate monolithic integration of intrinsic quantum emitters in SiN with waveguides which show a room-temperature off-chip count rate of ~104 counts/s and clear antibunching behavior.

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关键词

silicon nitride photonic platform,quantum emitters,monolithic integration

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