Experimental Insights of Reverse Switching Charge for Antiferroelectric Hf_0.1Zr_0.9O₂

Experimental insights into a reverse switching charge for antiferroelectric (AFE) Hf0.1Zr0.9O2 are validated by pulse measurement and capacitance-voltage (C-V). The difference between saturation polarization (P-S) andremnant polarization (P-r) plays an important role in the model and is confirmed by the steep and gradual slope of the P-V loop, which is made by AFE and antiferroelectric-dielectric (AFE-DE), respectively. AFE capacitor yield far superior released charge (Q(D)) than capacitor of AFE-DE bilayers due to strong reverse switching of P-S and P-r difference. A nonhysteretic Q(D) scheme is proposedby alternatingbipolarAFEoperation without a DE to achieve a bidirectional enhancement. This work demonstrates an experimental Q(D) enhancement by an AFE system and supports the reverse switching concept. Index