Noble Infrared Optical Thickness Monitoring System Based on the Algorithm of Phase-Locked Output Current-Reflectivity Coefficient

COATINGS(2022)

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Abstract
With the rapid development of modern science and technology, the application of infrared (IR) optical thin films is increasingly widespread, including in aerospace, autonomous driving, military development, and the fight against Coronavirus Disease 2019 (COVID-19), in which thin film devices play an important role. Similarly, with the improvement of user requirements, the precision requirements for the preparation of optical films are also developing and improving. In this paper, the IR optical thickness monitoring system is studied with the noble algorithm introducing the phase-locked amplifier current and single film reflectivity coefficient. An optical control system is developed to monitor the IR thin film accurately, which aids the IR narrow-band filter film research.
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Key words
infrared optical, monitor, narrow-band filter film
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