Interferometric sphere surface metrology with cylindrical reference for precision topography

APPLIED OPTICS(2022)

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摘要
We demonstrate a method for measuring a surface map of a spherical body with interferometric optical point sensors while rotating the test subject. The setup takes advantage of the excellent performance of heterodyne interferometry at nanometer levels and suppression of common-mode errors, as a cylindrical mirror mounted adjacent to the sphere is used as a reference. Future space based missions for gravitational wave research demand an improved inertial reference sensor with reduced acceleration noise levels. Spherical test masses can enable increased performance by suspension-free operation, contrary to cuboid solutions suffering from cross-coupling of attitude control noise into test mass position. However, interferometric readout is affected by surface irregularities and test mass attitude. An accurate surface map for compensation of the center of gravity readout should be established, by characterization either a priori or in-flight, when optical path length changes due to the surface occur in the measurement bandwidth. (C) 2022 Optica Publishing Group
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