The Effect of Transition Metals on the Dielectric Properties of Diamond-Like Silicon–Carbon Films

Studies of the effect of transition metals on the phase composition and electric and dielectric properties of diamond-like silicon–carbon films fabricated by plasma chemical decomposition of poly(phenylmethylsiloxane) are conducted. Frequency, temperature, and concentration dependences of the specified properties are obtained. It is shown that electrical conductivity continuously increases with the increase in the concentration of the metal and the concentration dependences of dielectric permeability and dielectric loss tangent have a minimum at the concentration of the metal of 0.5–2 at %. The possible reasons for this phenomenon are analyzed.