Extraction of small-signal equivalent circuit for de-embedding of 3D vertical nanowire transistor

Bruno Neckel Wesling,Marina Deng,Chhandak Mukherjee,Magali de Matos,Abhishek Kumar,Guilhem Larrieu,Jens Trommer,Thomas Mikolajick,Cristell Maneux

Solid-State Electronics（2022）

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摘要

•De-embedding of the emerging 3D vertical nanowire transistor.•EM simulation of virtual structures for parasitic extraction.•Distributed small-signal equivalent circuit for low silicon substrate resistivity.

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关键词

Test structure,Equivalent circuit,Parasitic components,RF measurements,De-embedding

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