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Improve the precision of electrochemical micromachining with parabolic pulse current

The International Journal of Advanced Manufacturing Technology(2022)

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Abstract
In pulse electrochemical micromachining, improving the machining accuracy of the workpiece depends on the relatively small corrosion volume of the material during the ultrashort pulse duration. Shortening the pulse width and reducing energy per pulse can improve machining accuracy. This paper proposed a new technique for electrochemical micromachining with parabolic voltage signal, and a mathematical model of the system is developed. Based on this model, the relationship equation between the machining accuracy and the process parameters of the system is derived. Using this function, the electric double-layer voltage response and the localization of system processing are analyzed. Machining localization as a function of the frequency and bias voltage of parabolic signals is simulated and compared with the experimental results. A good agreement between the model simulations and experimental results is obtained. Compared with the rectangular pulse, the energy per pulse of the parabolic waveform is reduced to 1/8, and the machining gap is decreased by approximately ten times. Some microstructures were successfully processed by this method, with the machining accuracy reaching the nanometer level. The proposed technique does not require an expensive ultrashort pulse power supply, facilitating its use in industrial applications.
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Key words
Electrochemical micromachining,Parabolic signal,Nanoaccuracy machining,Accuracy prediction
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