Vertical Schottky ultraviolet photodetector based on graphene and top-down fabricated GaN nanorod arrays

JOURNAL OF SEMICONDUCTORS(2022)

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摘要
GaN has been widely used in the fabrication of ultraviolet photodetectors because of its outstanding properties. In this paper, we report a graphene-GaN nanorod heterostructure photodetector with fast photoresponse in the UV range. GaN nanorods were fabricated by a combination mode of dry etching and wet etching. Furthermore, a graphene-GaN nanorod heterostructure ultraviolet detector was fabricated and its photoelectric properties were measured. The device exhibits a fast photoresponse in the UV range. The rising time and falling time of the transient response were 13 and 8 ms, respectively. A high photovoltaic responsivity up to 13.9 A/W and external quantum efficiency up to 479% were realized at the UV range. The specific detectivity D*= 1.44 x 10(10)( )Jones was obtained at -1 V bias in ambient conditions. The spectral response was measured and the highest response was observed at the 360 nm band.
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关键词
graphene,GaN nanorods,ultraviolet photodetector,top-down fabrication
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