Light trapping PMMA planar ridged waveguide on a laser textured silicon substrate for ultra-low reflectivity
Optics & Laser Technology(2022)
摘要
•Micro-structures on monocrystalline silicon surface with base angle of 55 degrees were fabricated by UV laser.•PMMA film was selected to deposited on the textured surface to construct the CTIRF structure.•The fabricated micro-structure had been nested with the PMMA film to form a close chimera.•The reflectivity of the CTIRF structure containing regular pyramid micro-structure had notably decreased to under 1.45%.
更多查看译文
关键词
Monocrystalline silicon (mono c-Si),Laser,Composite structure,Textured surface,Ultra-low reflectivity
AI 理解论文
溯源树
样例
![](https://originalfileserver.aminer.cn/sys/aminer/pubs/mrt_preview.jpeg)
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要