Light trapping PMMA planar ridged waveguide on a laser textured silicon substrate for ultra-low reflectivity

•Micro-structures on monocrystalline silicon surface with base angle of 55 degrees were fabricated by UV laser.•PMMA film was selected to deposited on the textured surface to construct the CTIRF structure.•The fabricated micro-structure had been nested with the PMMA film to form a close chimera.•The reflectivity of the CTIRF structure containing regular pyramid micro-structure had notably decreased to under 1.45%.