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二硫化钼薄膜的光敏特性探究

骆思成,熊礼威,汪刚,张泽,武超国

Petroleum & Petrochemical Material Procurement（2022）

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Abstract
采用化学气相沉积法(Chemical Vapor Deposition, CVD)在蓝宝石衬底上制备两种不同层数的MoS2薄膜,通过光学显微镜,拉曼光谱对MoS2薄膜进行表征,并利用电化学工作站与特定的光源探究不同层数薄膜的光敏性能差异.实验结果表明,单层MoS2薄膜具有最佳的光电灵敏度与响应速度,其光电流达到了暗电流的46倍,而4层MoS2薄膜的响应度高达0.60mA/W,但具有较长的响应时间.
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