调制结构对Cr-CrN-Cr-CrAlN多层膜性能的影响CHEN Qu-ping,LIN Song-sheng,LIU Ling-yun,GUO Chao-qian,SHI Qian,WANG Yun-cheng,LÜ Liang,LIU Ruo-yu,YI Chu-shanVacuum（2022）引用 0|浏览22AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
