Simulation for stability of a beam-mass based high-resolution MEMS gravimeter

Guigen Ye,Xuejun Fan,Luke M. Middelburg,Brahim El Mansouri,René H. Poelma,Guoqi Zhang

Materials & Design（2022）

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摘要

•Stability and mechanistic simulations for a MEMS gravimeter are conducted.•General principles for the improvement of relative gravimeter are explained.•Three distinct deformation modes of a 4-beam-mass MEMS system are identified.•The mode with buckling present a very sensitive and unstable region.•The mode without buckling and zero-stiffness provide a stable low resonance frequency.

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关键词

Microelectromechanical systems (MEMS),Relative gravimeter,Non-linear finite element analysis,Bucking,Stability,Zero-stiffness

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