Microfabrication of the electromagnetic bandgap structure for incorporating into the dielectric substrate of the millimeter-band planar slow-wave structure

Using artificial materials such as electromagnetic bandgap structures can be one of the promising ways to improve the efficiency of compact miniaturized vacuum electronic devices such as millimeter-band traveling-wave tubes with 2D planar microstrip slow-wave structures on dielectric substrates. Precision micromachining of the microsized elements of the electromagnetic bandgap structures is challenging. Here we proposed and studied an approach for microfabrication of the electromagnetic bandgap structure with microsized patterns by pulsed laser ablation. The obtained results of the morphology studies by scanning electron microscopy and optical microscopy show that the proposed approach allows fabricating of the microsized pattern with suitable tolerance. Also, we showed several results of numerical simulations of the electromagnetic parameters of the meander-line slow-wave structure on a dielectric substrate with an incorporated electromagnetic bandgap structure.