Properties of Miniature Cantilever-Type Ultrasonic Motor Using Lead-Free Array-Type Multilayer Piezoelectric Ceramics of (Sr,Ca)₂NaNb₅O₁₅under High Input Power

The properties of miniature cantilever-type ultrasonic motors using lead-free array-type multilayer piezoelectric ceramics of (Sr,Ca)2NaNb5O15 (SCNN) developed using the design rule were investigated under high input power by comparison with the high-power properties of SCNN ceramics. The frequency dependence of the revolution speed reflected the nonlinear behavior of SCNN ceramics with the hard-spring effect and showed a mirror-reversed image relative to that of the motor of Pb(Zr,Ti)O3 (PZT) ceramics. The output power increased linearly with increasing input power up to 110 mW without heat generation, and the driving properties were almost the same as the expectations under low input power. The output power density characteristics of the motors were high in comparison with those of the commercialized motors of PZT ceramics. It appeared that the motors have a high potential as an environmental friendly piezoelectric device with excellent properties, reflecting the high-power properties of SCNN ceramics.