Tailored beam shaping to improve microfluidics chips welding with ultra-short pulse laser

Laser-based Micro- and Nanoprocessing XVI(2022)

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摘要
The microfluidics field, due to its various possibilities in the study of chemical and biological reactions with only few consumables, is expanding significantly. A flexible solution has been developed based on Ultra-Short Pulsed laser technology to engrave different microfluidic channels on a chip, and to seal them. We describe here a solution to improve the welding’s speed and quality based on a tailored beam shaping with Multi-Plane Light Conversion (MPLC) technology. The fully reflective module is used with a high-power femtosecond laser. The optical performance of the module and achieved improvement on the welding are detailed.
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关键词
microfluidics chips,beam shaping,laser,ultra-short
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