Versatile fully reflective beam splitter for high throughput manufacturing with high power green femtosecond laser

Laser microprocessing using Ultra-Short Pulse lasers has developed thanks to the achieved process quality. The main challenge of those processes is the yield improvement. This study will focus on yield improvement of applications such as such as probe card manufacturing for electronic applications with a green USP laser using beam splitting. We present here a fully reflective beam splitter compatible with 500fs green lasers. The compatibility with an industrial machine is demonstrated through a F-theta lens, as well as through a precession head. We show here the process results including the repeatability of the pattern, and the achievable ablation rate.