Simulation research on miniature planar induction heater with cavity

Abstract This paper studies a new type of miniature planar induction heater through simulation. The miniature plane induction heater consists of a metal heating plate, a glass slide and a plane coil. The metal micro heating plate is designed with a cavity of a specific size. Since the cavity contains residual gas, when the micro heating plate is heated, hot bubbles will be generated in the cavity better and faster. Through the analysis of the energy density, eddy current density, and temperature distribution of the metal micro heating plate, it is found that the cavities play a very good role in the concentration of eddy current and the increase of energy. This kind of micro planar induction heater can be used for various hot bubbles to drive micro execution devices, such as micro ejectors, micro mixers and micro pumps.