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Plastic strain relaxation and alloy instability in epitaxial corundum-phase (Al,Ga)2O3 thin films on r-plane Al2O3

Marius Grundmann,Tillmann Stralka,Michael Lorenz,Susanne Selle,Christian Patzig,Thomas Höche

Materials Advances（2021）

Cited 5|Views4
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Abstract
The growth of (AlxGa1−x)2O3 alloy thin films in the corundum phase on r-plane (01.2) Al2O3 substrates is investigated.
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