Improving the Accuracy of Microhardness Measurement of Nanoelectronic Elements by the Silicic Probes of Atomic-Force Microscopy, that is Modified by Carbon Coverage
New Technologies, Development and Application IVLecture Notes in Networks and Systems（2021）
Key words
Atomic-force microscopy, Microhardness, Nanoelectronics, Silicic probe, Accuracy
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