Fabrication and Evaluation of Diaphragm Vibration Energy Harvester with 2D Mechanical Metamaterial Structure
The Proceedings of the Symposium on Micro-Nano Science and Technology(2020)
Abstract
In this paper, we propose a low-frequency diaphragm vibration energy harvester with a 2D mechanical metamaterial structure in the elastic layer. In general, diaphragm-type devices have a higher resonance frequency than cantilever-type devices. However, the metamaterial structure of the elastic layer is used to reduce the bending rigidity of the diaphragm-type devices to achieve a low resonance frequency approaching that of environmental vibrations. After investigating the device shape by FEM analysis, a diaphragm-type device was fabricated by combining the organic sacrificial layer etching method with a multilayer deposition method of piezoelectric polymer film, which can be deposited on a relatively large area with high yield, and its vibration and power generation characteristics were evaluated.
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Key words
Broadband Vibration Energy Harvesting,Wireless Energy Harvesting,Vibration-Based Generators,RF Energy Harvesting,Nonlinear Energy Harvesting
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