Квантово-каскадный лазер с выводом излучения через текстурированный слой

Физика и техника полупроводников(2021)

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摘要
The results of studies of ring quantum-cascade laser with a surface emission with radiation output through a textured layer formed in the layers of the top cladding of the waveguide by ultrahigh vacuum ion beam milling are presented. The far-field profile shows that the radiation is output through the windows with a textured layer in the range of angles of ~ 63–75 degrees to the normal.
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